Metrology

Efficient, simultaneous testing Optical wafer testing for µLEDs

The new Lumitop 4000 with a 100 mm lens is particularly well suited to μLED wafer testing. With a field of view of approximately 1.0 x 1.4 cm2 it can measure thousands of μLEDs in parallel with a minimum pixel size as low as 30 µm. A hardware trigger synchronizes the camera with the given cycle time. The 12 MP CMOS sensor offers a particularly broad dynamic range, says the manufacturer. The accompanying comprehensive Lumisuite software enables wide-ranging analyses of the readings, including the preparation of a pixel intensity map or color map. Algorithms can search for and mark pixel defects according to selectable criteria. The system is ideally suited for use in the laboratory and production line.

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